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Pushing the performance of electro-mechanical thin films
Published on Oct 20, 20162213 Views
We are witnessing the advent of the 4th industrial revolution, and are heading towards a largely robotized world. A lot of analogue electro-mechanical devices for sensing, actuation, communication, an
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Chapter list
Pushing the Performance of Electro-Mechanical Thin Films00:00
Downscaling00:14
There is more than microelectronics!02:31
Towards industry 4.0, robot society, etc.03:49
Important Role of Piezoelectrics - 104:57
Important Role of Piezoelectrics - 205:50
Outline06:45
Basics of piezoelectrics: polar chain example07:25
Consequences and Symmetry requirements09:35
Basics of piezoelectrics: polar structures10:48
Frequently encountered situation with one polar axes11:30
Concept of Coupling Factor K212:46
Ferroelectric materials as piezoelectric ceramics14:21
Strong piezoelectric effects are found in inorganic crystals15:49
+ Ferroelectricity, adding highly polarizable ions16:27
Thin film situation on elastic layer/substrate18:23
Piezoelectric MEMS structures and devices19:43
More motion20:44
Immense Frequency range of piezoelectric thin films21:27
Materials “Road Map”22:42
Progress in PZT and related films23:57
AlScN: Comparison of e31,f values24:29
How to put materials into microsystems25:45
Chemical solution deposition (sol-gel): Automatic CSD tool25:49
Sol-Gel PZT total solution26:01
In-situ Sputter deposition of PZT thin films26:25
Sputter deposition of AlN26:38
Integration: PZT in silicon MEMS26:58
Nucleation issue in PZT growth27:53
Nucleation controlled growth of Pb(Zr,Ti)O328:04
Thermodynamics of PZT deposition28:05
Pb-Ti-O seed layers on Pt(111)28:08
X-Ray diffraction, sputter deposited PZT from compound target29:28
Difficult to analyze with standard techniques (SEM, XPS)30:07
PbO adatoms on Pt: large diffusion paths30:36
Site controlled nucleation and growth of small ferroelectric PZT single crystals31:03
Sputter Deposition from a single ceramic target31:33
EDX analysis of sputtered PZT thin film31:59
Example of sputtered PZT thin film32:08
Performance issue: break down and film cracking32:35
Cracks evidencing in stress loops32:58
“Self cracking”33:33
Stress resistance - Toughness34:30
How large is the toughness coefficient?35:18
E-field ---- e31,f ---- Stress35:46
Lessons learned37:01
Aging of interdigitated transducers with Lead Zirconate Titanate thin films37:08
Motivations for IDE on PZT37:42
Vibration energy harvesting with IDE’s37:55
Processing – Fabrication Route38:15
Finite element simulation (FEM)38:52
PV Loop Corrections39:01
IDE Properties - Ageing39:21
Possible Model for Ageing with IDE’s40:21
Reliability – Life time issue Accelerated test41:12
Accelerated cycling test41:14
Testing a sol-gel film (with gradient)41:14
10^9 cycles41:14
Conclusions42:04
Thanks for your attention43:36
Acknowledgements43:40