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Pushing the performance of electro-mechanical thin films
Published on 2016-10-202213 Views
We are witnessing the advent of the 4th industrial revolution, and are heading towards a largely robotized world. A lot of analogue electro-mechanical devices for sensing, actuation, communication, an
Presentation
Pushing the Performance of Electro-Mechanical Thin Films00:00
Downscaling03:57:46
There is more than microelectronics!42:11:38
Towards industry 4.0, robot society, etc.63:44:42
Important Role of Piezoelectrics - 182:44:57
Important Role of Piezoelectrics - 297:21:09
Basics of piezoelectrics: polar chain example123:50:56
Consequences and Symmetry requirements159:55:19
Basics of piezoelectrics: polar structures180:04:02
Frequently encountered situation with one polar axes191:47:35
Concept of Coupling Factor K2212:48:56
Ferroelectric materials as piezoelectric ceramics239:10:30
Strong piezoelectric effects are found in inorganic crystals263:37:36
+ Ferroelectricity, adding highly polarizable ions274:24:24
Thin film situation on elastic layer/substrate306:26:46
Piezoelectric MEMS structures and devices328:39:13
More motion345:37:12
Immense Frequency range of piezoelectric thin films357:39:51
Materials “Road Map”378:29:54
Progress in PZT and related films399:23:58
AlScN: Comparison of e31,f values408:18:35
How to put materials into microsystems429:25:21
Chemical solution deposition (sol-gel): Automatic CSD tool430:20:41
Sol-Gel PZT total solution433:48:38
In-situ Sputter deposition of PZT thin films440:22:12
Sputter deposition of AlN444:02:20
Integration: PZT in silicon MEMS449:34:51
Nucleation issue in PZT growth464:53:19
Nucleation controlled growth of Pb(Zr,Ti)O3467:56:46
Thermodynamics of PZT deposition468:15:22
Pb-Ti-O seed layers on Pt(111)469:02:54
X-Ray diffraction, sputter deposited PZT from compound target491:17:37
Difficult to analyze with standard techniques (SEM, XPS)502:09:51
PbO adatoms on Pt: large diffusion paths510:05:31
Site controlled nucleation and growth of small ferroelectric PZT single crystals517:43:09
Sputter Deposition from a single ceramic target526:03:16
EDX analysis of sputtered PZT thin film533:08:14
Example of sputtered PZT thin film535:45:13
Performance issue: break down and film cracking543:11:08
Cracks evidencing in stress loops549:27:39
“Self cracking”559:12:41
Stress resistance - Toughness575:07:13
How large is the toughness coefficient?588:35:28
E-field ---- e31,f ---- Stress596:10:39
Lessons learned617:08:32
Aging of interdigitated transducers with Lead Zirconate Titanate thin films619:00:15
Motivations for IDE on PZT628:21:55
Vibration energy harvesting with IDE’s632:06:40
Processing – Fabrication Route637:44:39
Finite element simulation (FEM)647:55:56
PV Loop Corrections650:25:38
IDE Properties - Ageing656:01:15
Possible Model for Ageing with IDE’s672:31:54
Reliability – Life time issue Accelerated test686:52:26
Accelerated cycling test687:16:00
Testing a sol-gel film (with gradient)687:22:20
10^9 cycles687:29:34
Conclusions701:15:46
Thanks for your attention726:54:07
Acknowledgements727:50:10