Pushing the performance of electro-mechanical thin films

Published on 2016-10-202213 Views

We are witnessing the advent of the 4th industrial revolution, and are heading towards a largely robotized world. A lot of analogue electro-mechanical devices for sensing, actuation, communication, an

Kolokviji na Institutu "Jožef Stefan"

Presentation

Pushing the Performance of Electro-Mechanical Thin Films00:00

Downscaling03:57:46

There is more than microelectronics!42:11:38

Towards industry 4.0, robot society, etc.63:44:42

Important Role of Piezoelectrics - 182:44:57

Important Role of Piezoelectrics - 297:21:09

Basics of piezoelectrics: polar chain example123:50:56

Consequences and Symmetry requirements159:55:19

Basics of piezoelectrics: polar structures180:04:02

Frequently encountered situation with one polar axes191:47:35

Concept of Coupling Factor K2212:48:56

Ferroelectric materials as piezoelectric ceramics239:10:30

Strong piezoelectric effects are found in inorganic crystals263:37:36

+ Ferroelectricity, adding highly polarizable ions274:24:24

Thin film situation on elastic layer/substrate306:26:46

Piezoelectric MEMS structures and devices328:39:13

More motion345:37:12

Immense Frequency range of piezoelectric thin films357:39:51

Materials “Road Map”378:29:54

Progress in PZT and related films399:23:58

AlScN: Comparison of e31,f values408:18:35

How to put materials into microsystems429:25:21

Chemical solution deposition (sol-gel): Automatic CSD tool430:20:41

Sol-Gel PZT total solution433:48:38

In-situ Sputter deposition of PZT thin films440:22:12

Sputter deposition of AlN444:02:20

Integration: PZT in silicon MEMS449:34:51

Nucleation issue in PZT growth464:53:19

Nucleation controlled growth of Pb(Zr,Ti)O3467:56:46

Thermodynamics of PZT deposition468:15:22

Pb-Ti-O seed layers on Pt(111)469:02:54

X-Ray diffraction, sputter deposited PZT from compound target491:17:37

Difficult to analyze with standard techniques (SEM, XPS)502:09:51

PbO adatoms on Pt: large diffusion paths510:05:31

Site controlled nucleation and growth of small ferroelectric PZT single crystals517:43:09

Sputter Deposition from a single ceramic target526:03:16

EDX analysis of sputtered PZT thin film533:08:14

Example of sputtered PZT thin film535:45:13

Performance issue: break down and film cracking543:11:08

Cracks evidencing in stress loops549:27:39

“Self cracking”559:12:41

Stress resistance - Toughness575:07:13

How large is the toughness coefficient?588:35:28

E-field ---- e31,f ---- Stress596:10:39

Lessons learned617:08:32

Aging of interdigitated transducers with Lead Zirconate Titanate thin films619:00:15

Motivations for IDE on PZT628:21:55

Vibration energy harvesting with IDE’s632:06:40

Processing – Fabrication Route637:44:39

Finite element simulation (FEM)647:55:56

PV Loop Corrections650:25:38

IDE Properties - Ageing656:01:15

Possible Model for Ageing with IDE’s672:31:54

Reliability – Life time issue Accelerated test686:52:26

Accelerated cycling test687:16:00

Testing a sol-gel film (with gradient)687:22:20

10^9 cycles687:29:34

Conclusions701:15:46

Thanks for your attention726:54:07

Acknowledgements727:50:10